Lamella, APT, XRM

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microSTRUCT

Highly Versatile Laser
Micromachining Systems

3D-Micromac‘s microSTRUCT™ laser systems 은 주로 제품 개발 및 연구개발에 적용할 수 있는 Laser 미세 조정 장비 입니다.
이 기술을 통해 금속, 반도체, 합금 세라믹, 바이오 재료, 얇은 Film sample을 Structing, cutting, drilling 그리고 welding application에 적합합니다.

microSTRUCT - System Configuration

Laser Sources
  • · The system is prepared for integration of one ps laser source(basic)
  • · Up to two simultaneous laser sources
  • · Available laser type:ps, ns, fs
Beam delivery unit
  • · Up to four beam paths for differnt wavelengths(1064, 532, 355mm0
  • · 2D and 3D galvo scanner models or fixed optics available
  • · Power measurement at work piece level
Positioning system
  • · Direct-driven XY positioning system
  • · Travel distance 600nn X 300mm
  • · Positioning accuracy ± 0.002mm
  • · Repeatability ± 0.001mm
working area
  • · Up to two separate working areas
  • · Max. substrate size 250 X 275 X 40 mm²
Alignment
  • · Manual, semi-automated or fully-automated work piece alignment with XY system and optical measurement system available
  • · Automatic Z positioning
Softwar microMMI
  • · Control and supervise of all hardware components and machining parameters
  • · Differnt user levels (administrator, supervisor, operator)
  • · Data input file types : DXF, CSV, Gerber, CLI, others on request
Safety
  • · Laser class 1 housing with integrated control panel
  • · Certified laser window or overview camera (webcam)
  • · Active exhaust system included
Dimensions
  • · 2540 X 1600 X 1960 mm³ (L x W x H)
  • · Approx. 3.5t
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