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microCELL

Laser Systems for Processing
Silicon Solar Cells

3D-Micromac‘s microCELL™ OTF Dual Lane은 mono- and polycrystalline silicon solar cells에 적합한 Laser 장비 입니다.
The microCELL™ OTF Dual Lane meets cell은 PERC solar cells 공정에 효율적이며 정밀한 표면 구조, 적은 유지보수 비용을 통해
효율적인 가용성을 제공합니다. 혁신적인 레이저 공정을 통해 Solar cells 생산에 최대의 처리량과 수율을 달성할 수 있습니다.

microCELL OTF Dual Lane offers

  • On-the-fly laser processing with unbeatable cost-benefit ratio
  • High throughput and efficiency (> 8,000 wph)
  • Low cost of ownership and CAPEX
  • Upgrade for existing production lines or expansion
  • Easy accessible for servicing

microCELL - System Configuration

Wafer size · Up to 300mm(12’’) wafer size
Laser sources
  • · Two integrated long lifetime, low maintenance fiber laser sources
  • · One fiber laser source for cleaving process
  • · One fiber laser source for soft scribing process
Positioning system
  • · Direct driven XY-gantry system
  • · Rotation axis with vacuum chuck
  • · Z positioning system for laser potics and cameras
  • · Position accuracy X axis : ± 0.0018mm, repeatability : ± 0.00075mm
  • · Position accuracy Y axis : ± 0.001mm, repeatability : ± 0.0004mm
Wafer chuck
  • · Vacuum chuck up to 300 mm wafer size (tape and frame)
  • · Integrated patented micro stretching function for edge protection
Software microMMI
  • · Control of all components and parameters
  • · Different user levels supported 9administrator, supervisor, poerator)
Standards
  • · Compatible with common SEMI standards
  • · Laser safety class 1
  • · Clean room class 6
Consumables
  • · Cooling water, compressed air, electrical power
  • · Only 600 ml DI-water for 1 h active dicing time
Machine dimensions · 2005 x 2000 x 2090 mm³ (W x H x D) incl. automatic handling
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